发明授权
- 专利标题: Multichannel devices with improved performance
- 专利标题(中): 具有改进性能的多通道设备
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申请号: US14533752申请日: 2014-11-05
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公开(公告)号: US09419120B2公开(公告)日: 2016-08-16
- 发明人: Bettina A. Nechay , Shalini Gupta , Matthew Russell King , Eric J. Stewart , Robert S. Howell , Justin Andrew Parke , Harlan Carl Cramer , Howell George Henry , Ronald G. Freitag , Karen Marie Renaldo
- 申请人: Bettina A. Nechay , Shalini Gupta , Matthew Russell King , Eric J. Stewart , Robert S. Howell , Justin Andrew Parke , Harlan Carl Cramer , Howell George Henry , Ronald G. Freitag , Karen Marie Renaldo
- 申请人地址: US VA Falls Church
- 专利权人: Northrop Grumman Systems Corporation
- 当前专利权人: Northrop Grumman Systems Corporation
- 当前专利权人地址: US VA Falls Church
- 代理机构: Tarolli, Sundheim, Covell & Tummino LLP
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L31/072 ; H01L31/109 ; H01L31/0328 ; H01L31/0336 ; H01L29/778 ; H01L29/66 ; H01L29/10
摘要:
A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.
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