发明授权
- 专利标题: Flip-chip LED and fabrication method thereof
- 专利标题(中): 倒装芯片LED及其制造方法
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申请号: US14654183申请日: 2013-03-01
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公开(公告)号: US09419173B2公开(公告)日: 2016-08-16
- 发明人: Hongbo Yu
- 申请人: ENRAYTEK OPTOELECTRONICS CO., LTD.
- 申请人地址: CN Shanghai
- 专利权人: ENRAYTEK OPTOELECTRONICS CO., LTD.
- 当前专利权人: ENRAYTEK OPTOELECTRONICS CO., LTD.
- 当前专利权人地址: CN Shanghai
- 代理机构: Muncy, Geissler, Olds & Lowe, P.C.
- 优先权: CN201310041872 20130201
- 国际申请: PCT/CN2013/072082 WO 20130301
- 国际公布: WO2014/117419 WO 20140807
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L33/38 ; H01L33/60 ; H01L33/06 ; H01L33/40 ; H01L33/20
摘要:
A flip-chip LED and a method for forming the LED are disclosed. The method includes: providing a substrate and depositing on the substrate an epitaxial layer including, from the bottom upward, an n-type GaN layer, a multi-quantum well active layer, and a p-type GaN layer; etching the epitaxial layer to form an array of openings exposing the n-type GaN layer; forming a first metal layer on the p-type GaN layer; annealing the first metal layer to induce self-assembly thereof; etching the p-type GaN layer by using the first metal layer as a mask such that an array of holes formed therein; and depositing a second metal layer over the array of holes, the second metal layer and the first metal layer form a metal reflector layer. The design can result in an improvement in the light extraction efficiency of the LED.
公开/授权文献
- US20150349195A1 FLIP-CHIP LED AND FABRICATION METHOD THEREOF 公开/授权日:2015-12-03
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