Invention Grant
- Patent Title: Systems and methods for improved radio frequency matching networks
- Patent Title (中): 改进射频匹配网络的系统和方法
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Application No.: US14815947Application Date: 2015-07-31
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Publication No.: US09425026B2Publication Date: 2016-08-23
- Inventor: Suhail Anwar , Carl A. Sorensen , Jozef Kudela
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc
- Current Assignee: Applied Materials, Inc
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H05B31/26 ; H01J37/32 ; H03H7/40

Abstract:
Systems and methods are provided for matching the impedance of a load to an impedance of a power generator. Embodiments include a matching network with a dynamically configurable component assembly array couplable to the variable impedance load and the RF power generator, wherein the component assembly array includes one or more tune and load electrical components. The component assembly array is adapted to be configured for each recipe step, and at least one of the electrical components is a variable impedance component adjustable to reduce RF energy reflected from the variable impedance load for each recipe step. Numerous other aspects are provided.
Public/Granted literature
- US20160049917A1 SYSTEMS AND METHODS FOR IMPROVED RADIO FREQUENCY MATCHING NETWORKS Public/Granted day:2016-02-18
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