Invention Grant
- Patent Title: Methods of producing integrated circuits with an air gap
- Patent Title (中): 具有气隙的集成电路的制造方法
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Application No.: US14525796Application Date: 2014-10-28
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Publication No.: US09431294B2Publication Date: 2016-08-30
- Inventor: Ming He , Errol Todd Ryan , Roderick Alan Augur , Craig Child , Larry Zhao
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L21/76 ; H01L21/768 ; H01L21/02 ; H01L23/532 ; H01L23/528

Abstract:
Integrated circuits and methods for producing the same are provided. A method for producing an integrated circuit includes forming an interconnect trench in a dielectric layer, and forming a conformal barrier layer overlying the dielectric layer and within the interconnect trench. A barrier spacer is formed by removing the conformal barrier layer from an interconnect trench bottom, and an interconnect is formed within the interconnect trench after forming the barrier spacer. An air gap trench is formed in the dielectric layer adjacent to the barrier spacer, and a top cap is formed overlying the interconnect and the air gap trench, where the top cap bridges the air gap trench to produce an air gap in the air gap trench.
Public/Granted literature
- US20160118292A1 INTEGRATED CIRCUITS WITH AN AIR GAP AND METHODS OF PRODUCING THE SAME Public/Granted day:2016-04-28
Information query
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