Invention Grant
- Patent Title: Coaxial solder bump support structure
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Application No.: US13962194Application Date: 2013-08-08
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Publication No.: US09431359B2Publication Date: 2016-08-30
- Inventor: Brian M. Erwin , Ian Melville , Ekta Misra , George J. Scott
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Steven J. Meyers
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/00

Abstract:
A solder bump support structure and method of manufacturing thereof is provided. The solder bump support structure includes an inter-level dielectric (ILD) layer formed over a silicon substrate. The ILD layer has a plurality of conductive vias. The structure further includes a first insulation layer formed on the ILD layer. The solder bump support structure further includes a pedestal member formed on the ILD layer which includes a conductive material formed above the plurality of conductive vias in the ILD layer coaxially surrounded by a second insulation layer. The second insulation layer is thicker than the first insulation layer. The structure further includes a capping under bump metal (UBM) layer formed over, and in electrical contact with, the conductive material and formed over at least a portion of the second insulation layer of the pedestal member.
Public/Granted literature
- US20130320528A1 COAXIAL SOLDER BUMP SUPPORT STRUCTURE Public/Granted day:2013-12-05
Information query
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