Invention Grant
US09431381B2 System and method of processing cutting layout and example switching circuit
有权
切割布局和示例切换电路的处理方法及系统
- Patent Title: System and method of processing cutting layout and example switching circuit
- Patent Title (中): 切割布局和示例切换电路的处理方法及系统
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Application No.: US14500528Application Date: 2014-09-29
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Publication No.: US09431381B2Publication Date: 2016-08-30
- Inventor: Tung-Heng Hsieh , Hui-Zhong Zhuang , Chung-Te Lin , Sheng-Hsiung Wang , Ting-Wei Chiang , Li-Chun Tien
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Hauptman Ham, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01L27/02

Abstract:
A method of processing a gate electrode cutting (CUT) layout usable for fabricating an integrated circuit (IC) is disclosed. The method includes determining if a first CUT layout pattern and a second CUT layout pattern are in compliance with a predetermined spatial resolution requirement. If the first CUT layout pattern and the second CUT layout pattern are not in compliance with the predetermined spatial resolution requirement, a merged CUT layout pattern is generated based on the first CUT layout pattern, the second CUT layout pattern, and a stitching layout pattern, and a remedial connecting layout pattern is added to a conductive layer layout. The stitching layout pattern corresponds to a carved-out portion of a third gate electrode structure. The remedial connecting layout pattern corresponds to fabricating a conductive feature electrically connecting two portions of the third gate electrode structure that are separated by the corresponding carved-out portion.
Public/Granted literature
- US20160093603A1 SYSTEM AND METHOD OF PROCESSING CUTTING LAYOUT AND EXAMPLE SWITCHING CIRCUIT Public/Granted day:2016-03-31
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