Invention Grant
- Patent Title: Deposition source
- Patent Title (中): 沉积源
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Application No.: US13923186Application Date: 2013-06-20
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Publication No.: US09435022B2Publication Date: 2016-09-06
- Inventor: Hye-Yeon Shim , Chang-Soon Ji , Jong-Woo Lee , Do-Sung Kwon
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2009-0091144 20090925
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/30 ; C23C14/26 ; H01L51/00 ; H01L51/56
Abstract:
A deposition source with uniform deposition characteristics includes a crucible in which a deposition material is disposed; a heat transfer member disposed on upper portions of the deposition material in the crucible; and an accommodation member for accommodating the heat transfer member and including a mesh plate.
Public/Granted literature
- US20130280441A1 DEPOSITION SOURCE Public/Granted day:2013-10-24
Information query
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