发明授权
US09446910B2 Substrate transfer robot, substrate transfer system, and method for transferring substrate
有权
基板传送机器人,基板传送系统和传送基板的方法
- 专利标题: Substrate transfer robot, substrate transfer system, and method for transferring substrate
- 专利标题(中): 基板传送机器人,基板传送系统和传送基板的方法
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申请号: US14285565申请日: 2014-05-22
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公开(公告)号: US09446910B2公开(公告)日: 2016-09-20
- 发明人: Yoshiki Kimura , Daisuke Shin
- 申请人: KABUSHIKI KAISHA YASKAWA DENKI
- 申请人地址: JP Kitakyushu-Shi
- 专利权人: KABUSHIKI KAISHA YASKAWA DENKI
- 当前专利权人: KABUSHIKI KAISHA YASKAWA DENKI
- 当前专利权人地址: JP Kitakyushu-Shi
- 代理机构: Mori & Ward, LLP
- 优先权: JP2013-108413 20130522
- 主分类号: G06F7/00
- IPC分类号: G06F7/00 ; B65G47/90 ; B25J9/04 ; H01L21/67 ; H01L21/677 ; B25J9/16
摘要:
A substrate transfer robot includes a hand to approach a substrate storage on which a substrate is placed, and to hold the substrate. An arm moves the hand. A controller controls a position and orientation of the hand. When in plan view, a substrate holding center at a time when the hand is holding the substrate is adjacent to the substrate storage and is at an access start position at a predetermined distance from the substrate storage, the substrate holding center reaches a substrate placement position in the substrate storage with a hand center line inclined toward an access straight line and with the hand holding center overlapping the access straight line. The hand center line is oriented from a base to a distal end of the hand. The access straight line is perpendicular to a front surface of the substrate storage and associated with the hand approaching the substrate storage.
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