Invention Grant
- Patent Title: Method of severing a semiconductor device composite
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Application No.: US14987910Application Date: 2016-01-05
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Publication No.: US09449879B2Publication Date: 2016-09-20
- Inventor: Guido Weiss , Albert Perchtaler
- Applicant: OSRAM Opto Semiconductors GmbH
- Applicant Address: DE
- Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee Address: DE
- Agency: DLA Piper LLP (US)
- Priority: DE102011054891 20111028
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L21/304 ; B23K26/38 ; B23K26/40 ; H01L21/683 ; H01L33/00 ; H01L33/38

Abstract:
A method of severing a semiconductor device composite includes a carrier having a main surface and a semiconductor layer sequence arranged on the main surface including forming a separating trench in the semiconductor device composite by a first laser cut such that the separating trench only partially severs the semiconductor device composite in a vertical direction running perpendicular to the main surface, and severing the semiconductor device composite completely along the separating trench with a severing cut with a laser.
Public/Granted literature
- US20160133520A1 METHOD OF SEVERING A SEMICONDUCTOR DEVICE COMPOSITE Public/Granted day:2016-05-12
Information query
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