Invention Grant
US09450122B2 Lateral type photodiode, image sensor including the same, and method of manufacturing the photodiode and the image sensor
有权
横向型光电二极管,包括该光电二极管的图像传感器,以及制造光电二极管和图像传感器的方法
- Patent Title: Lateral type photodiode, image sensor including the same, and method of manufacturing the photodiode and the image sensor
- Patent Title (中): 横向型光电二极管,包括该光电二极管的图像传感器,以及制造光电二极管和图像传感器的方法
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Application No.: US14711420Application Date: 2015-05-13
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Publication No.: US09450122B2Publication Date: 2016-09-20
- Inventor: Jihoon Ahn , Yongwoo Jeon , Jungwoo Kim , Haeseok Park , Seungeon Ahn , Seunghyup Lee , Myounghoon Jung , Hyuksoon Choi
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2014-0057952 20140514
- Main IPC: H01L31/102
- IPC: H01L31/102 ; H01L31/0336 ; H01L31/0352 ; H01L31/18 ; H01L31/105

Abstract:
Example embodiments relate to a lateral type photodiode including a substrate, an insulation mask layer formed on the substrate, and a first type semiconductor layer, an active layer, and a second type semiconductor layer that contact a surface of the insulation mask layer and that are sequentially disposed in a direction substantially parallel to the surface of the insulation mask layer. The insulation mask layer includes a through hole, and the first type semiconductor layer, the active layer, and the second type semiconductor layer are sequentially formed from the through hole by using a lateral overgrowth method.
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