Invention Grant
US09452922B2 Microelectromechanical device with signal routing through a protective cap 有权
具有通过保护盖的信号路由的微机电装置

Microelectromechanical device with signal routing through a protective cap
Abstract:
A microelectromechanical device includes: a body accommodating a microelectromechanical structure; and a cap bonded to the body and electrically coupled to the microelectromechanical structure through conductive bonding regions. The cap including a selection module, which has first selection terminals coupled to the microelectromechanical structure, second selection terminals, and at least one control terminal, and which can be controlled through the control terminal to couple the second selection terminals to respective first selection terminals according, selectively, to one of a plurality of coupling configurations corresponding to respective operating conditions.
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