Invention Grant
- Patent Title: Spin treatment apparatus
- Patent Title (中): 旋转治疗仪
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Application No.: US14491065Application Date: 2014-09-19
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Publication No.: US09454080B2Publication Date: 2016-09-27
- Inventor: Masaaki Furuya
- Applicant: Shibaura Mechatronics Corporation
- Applicant Address: JP Yokohama-shi
- Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee Address: JP Yokohama-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-198094 20130925; JP2014-162096 20140808
- Main IPC: B05C13/02
- IPC: B05C13/02 ; B05C11/02 ; G03F7/16 ; G03F7/30 ; G03F7/42 ; H01L21/687

Abstract:
A spin treatment apparatus according to an embodiment performs a treatment while rotating a substrate and includes: at least three clamp pins configured to contact an outer peripheral surface of the substrate and clamp the substrate; rotatable pin rotators provided for the respective clamp pins and each configured to retain the corresponding clamp pin at a position offset from a rotation axis of the pin rotator parallel with a rotation axis of the substrate; magnet gears provided for the respective pin rotators around outer peripheral surfaces thereof and each having a magnetic-pole part formed spirally about the rotation axis of the pin rotator; rotation magnets provided for the respective magnet gears and positioned to attract and be attracted by the magnetic-pole part of the corresponding magnet gear; and a movement mechanism configured to move the rotation magnets along the rotation axes of the pin rotators.
Public/Granted literature
- US20150083038A1 SPIN TREATMENT APPARATUS Public/Granted day:2015-03-26
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