发明授权
US09455105B2 Carbon nanotube or graphene based pressure switch 有权
碳纳米管或石墨烯基压力开关

Carbon nanotube or graphene based pressure switch
摘要:
The present invention describes systems and methods for providing a carbon or graphene based pressure switch. An exemplary embodiment of the present invention includes a semiconductor substrate; a cavity defined within the semiconductor substrate having a cross-sectional area and a depth; a bottom conductor disposed within the cavity; a conductive membrane disposed above the cavity and adapted to deflect towards the bottom conductor upon an applied pressure; an elastic, insulating layer disposed between the conductive membrane and the bottom conductor; and a switching element adapted to activate upon electrical communication between the conductive membrane and the bottom conductor.
公开/授权文献
信息查询
0/0