发明授权
US09456284B2 Dual-element MEMS microphone for mechanical vibration noise cancellation
有权
双元件MEMS麦克风,用于机械振动噪声消除
- 专利标题: Dual-element MEMS microphone for mechanical vibration noise cancellation
- 专利标题(中): 双元件MEMS麦克风,用于机械振动噪声消除
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申请号: US14216686申请日: 2014-03-17
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公开(公告)号: US09456284B2公开(公告)日: 2016-09-27
- 发明人: Michael Kai Morishita , Jianchun Dong
- 申请人: Google Inc.
- 申请人地址: US CA Mountain View
- 专利权人: Google Inc.
- 当前专利权人: Google Inc.
- 当前专利权人地址: US CA Mountain View
- 代理机构: McDonnell Boehnen Hulbert & Berghoff
- 主分类号: H04R1/00
- IPC分类号: H04R1/00 ; H04R19/04 ; H04R3/00
摘要:
Disclosed are systems, devices, and methods for minimizing mechanical-vibration-induced noise in audio signals. In one aspect, a microphone is disclosed that includes a first backplate, a first diaphragm, a second backplate, and a second diaphragm. The first diaphragm moves relative to the first backplate in response to acoustic pressure waves in an environment and mechanical vibrations of the microphone, thereby causing a first capacitance change between the first diaphragm and the first backplate. The second diaphragm is substantially acoustically isolated from the acoustic pressure waves, and moves relative to the second backplate in response to the mechanical vibrations of the microphone, thereby causing a second capacitance change between the second diaphragm and the second backplate. The microphone further includes or is communicatively coupled to an integrated circuit configured to generate an acoustic signal based on the first capacitance and the second capacitance.
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