Invention Grant
- Patent Title: Spectrometer
- Patent Title (中): 光谱仪
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Application No.: US14518855Application Date: 2014-10-20
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Publication No.: US09459146B2Publication Date: 2016-10-04
- Inventor: Keith Carron , Mark Watson , Shane Buller
- Applicant: MKS TECHNOLOGY
- Applicant Address: US CO Centennial
- Assignee: MKS Technology
- Current Assignee: MKS Technology
- Current Assignee Address: US CO Centennial
- Agency: Dinsmore & Shohl LLP
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01J3/44 ; G01N21/65

Abstract:
A spectroscopic system is provided. In one embodiment, the spectroscopic system comprises a light source adapted to provide a beam of illumination; an optical system adapted to provide the beam of illumination to a sample and receive a spectroscopy signal from the sample and direct the spectroscopy signal to at least one single channel detector, wherein the optical system comprises an adjustable dispersing element for directing one or more spectral features of the spectroscopy signal to the at least one single channel detector; a calibration detector adapted to determine a set point of the adjustable dispersing element; and a source synchronization component adapted to synchronize an operation of the light source and the at least one single channel detector. A method of calibrating a dispersing element of a spectrometer is also provided.
Public/Granted literature
- US20150099292A1 SPECTROMETER Public/Granted day:2015-04-09
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