Invention Grant
US09459797B2 Uniformly distributed self-assembled cone-shaped pillars for high efficiency solar cells 有权
用于高效太阳能电池的均匀分布的自组装锥形柱

Uniformly distributed self-assembled cone-shaped pillars for high efficiency solar cells
Abstract:
A method for fabricating a photovoltaic device includes applying a diblock copolymer layer on a substrate and removing a first polymer material from the diblock copolymer layer to form a plurality of distributed pores. A pattern forming layer is deposited on a remaining surface of the diblock copolymer layer and in the pores in contact with the substrate. The diblock copolymer layer is lifted off and portions of the pattern forming layer are left in contact with the substrate. The substrate is etched using the pattern forming layer to protect portions of the substrate to form pillars in the substrate such that the pillars provide a radiation absorbing structure in the photovoltaic device.
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