Invention Grant
US09460746B2 Creating a sub-micron pattern proximate a near-field transducer using in-slider waveguide and laser
有权
使用滑块内波导和激光器在近场传感器附近创建亚微米图案
- Patent Title: Creating a sub-micron pattern proximate a near-field transducer using in-slider waveguide and laser
- Patent Title (中): 使用滑块内波导和激光器在近场传感器附近创建亚微米图案
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Application No.: US14724129Application Date: 2015-05-28
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Publication No.: US09460746B2Publication Date: 2016-10-04
- Inventor: Daniel Richard Buettner , Joseph Michael Stephan , Douglas Hampton Cole , The Ngoc Nguyen
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee Address: US CA Cupertino
- Agency: Hollingsworth Davis, LLC
- Main IPC: G11B5/00
- IPC: G11B5/00 ; G11B5/48 ; G11B5/60 ; G11B13/08 ; G11B5/31 ; G11B5/105
Abstract:
An air-bearing surface of a slider is coated with a photoresist having a high optical absorbance at or near an operational wavelength of the slider. Light is directed at a target wavelength through an entry of a waveguide integrated into the slider. The light exiting the waveguide forms a feature through the photoresist, the feature proximate a near-field transducer of the slider. A sub-micron pattern is formed using the feature.
Public/Granted literature
- US20150348578A1 CREATING A SUB-MICRON PATTERN PROXIMATE A NEAR-FIELD TRANSDUCER USING IN-SLIDER WAVEGUIDE AND LASER Public/Granted day:2015-12-03
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