Invention Grant
- Patent Title: Contact techniques and configurations for reducing parasitic resistance in nanowire transistors
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Application No.: US14831307Application Date: 2015-08-20
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Publication No.: US09461141B2Publication Date: 2016-10-04
- Inventor: Ravi Pillarisetty , Benjamin Chu-Kung , Willy Rachmady , Van H. Le , Gilbert Dewey , Niloy Mukherjee , Matthew V. Metz , Han Wui Then , Marko Radosavljevic
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L29/423 ; H01L29/786 ; H01L29/06 ; H01L23/485 ; H01L29/775 ; H01L29/78 ; B82Y99/00 ; B82Y40/00

Abstract:
Embodiments of the present disclosure provide contact techniques and configurations for reducing parasitic resistance in nanowire transistors. In one embodiment, an apparatus includes a semiconductor substrate, an isolation layer formed on the semiconductor substrate, a channel layer including nanowire material formed on the isolation layer to provide a channel for a transistor, and a contact coupled with the channel layer, the contact being configured to surround, in at least one planar dimension, nanowire material of the channel layer and to provide a source terminal or drain terminal for the transistor.
Public/Granted literature
- US20160035860A1 CONTACT TECHNIQUES AND CONFIGURATIONS FOR REDUCING PARASITIC RESISTANCE IN NANOWIRE TRANSISTORS Public/Granted day:2016-02-04
Information query
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