Invention Grant
- Patent Title: Capacitance type sensor, acoustic sensor, and microphone
- Patent Title (中): 电容式传感器,声学传感器和麦克风
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Application No.: US14426536Application Date: 2013-08-12
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Publication No.: US09462364B2Publication Date: 2016-10-04
- Inventor: Yuki Uchida , Takashi Kasai
- Applicant: OMRON Corporation
- Applicant Address: JP Kyoto
- Assignee: OMRON Corporation
- Current Assignee: OMRON Corporation
- Current Assignee Address: JP Kyoto
- Agency: Osha Liang LLP
- Priority: JP2012-202978 20120914
- International Application: PCT/JP2013/071830 WO 20130812
- International Announcement: WO2014/041943 WO 20140320
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R1/08 ; H04R19/00 ; H04R7/06 ; H04R7/12 ; H04R19/04 ; H01L29/84

Abstract:
A capacitance type sensor has a substrate, a vibration electrode plate formed over the substrate, a back plate formed over the substrate so as to cover the vibration electrode plate, and a fixed electrode plate provided on the back plate so as to be opposite to the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is separated into a plurality of regions, each of the plurality of regions being formed with a sensing section including the vibration electrode plate and the fixed electrode plate. A barrier electrode is provided between respective sensing sections of at least one adjacent pair of regions of the plurality of regions to prevent signal interference between the respective sensing sections.
Public/Granted literature
- US20150245123A1 CAPACITANCE TYPE SENSOR, ACOUSTIC SENSOR, AND MICROPHONE Public/Granted day:2015-08-27
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