Invention Grant
US09466491B2 Methods of forming a semiconductor device with a spacer etch block cap and the resulting device
有权
用间隔物蚀刻块帽形成半导体器件的方法和所得到的器件
- Patent Title: Methods of forming a semiconductor device with a spacer etch block cap and the resulting device
- Patent Title (中): 用间隔物蚀刻块帽形成半导体器件的方法和所得到的器件
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Application No.: US14268579Application Date: 2014-05-02
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Publication No.: US09466491B2Publication Date: 2016-10-11
- Inventor: Daniel T. Pham , Hyun-Jin Cho , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/283 ; H01L29/423 ; H01L29/417 ; H01L21/768

Abstract:
One illustrative method disclosed herein includes, among other things, forming a sacrificial gate structure above a semiconductor substrate, forming a sidewall spacer adjacent opposite sides of the sacrificial gate structure, removing the sacrificial gate structure and forming a replacement gate structure in its place, at some point after forming the replacement gate structure, performing an etching process to reduce the height of the spacers so as to thereby define recessed spacers having an upper surface that partially defines a spacer recess, and forming a spacer etch block cap on the upper surface of each recessed spacer structure and within the spacer recess.
Public/Granted literature
- US20150318178A1 METHODS OF FORMING A SEMICONDUCTOR DEVICE WITH A SPACER ETCH BLOCK CAP AND THE RESULTING DEVICE Public/Granted day:2015-11-05
Information query
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