Invention Grant
US09466604B2 Metal segments as landing pads and local interconnects in an IC device
有权
金属片段作为IC器件中的着陆焊盘和局部互连
- Patent Title: Metal segments as landing pads and local interconnects in an IC device
- Patent Title (中): 金属片段作为IC器件中的着陆焊盘和局部互连
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Application No.: US14540724Application Date: 2014-11-13
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Publication No.: US09466604B2Publication Date: 2016-10-11
- Inventor: Youngtag Woo , Myungjun Lee , Ryan Ryoung-Han Kim , Jongwook Kye
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Dittavong & Steiner, P.C.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/82 ; H01L27/11 ; H01L27/02 ; H01L23/522 ; H01L23/528

Abstract:
Methods for utilizing metal segments of an additional metal layer as landing pads for vias and also as local interconnects between contacts in an IC device and resulting devices are disclosed. Embodiments include forming source/drain and gate contacts connected to transistors on a substrate in an integrated circuit device, each contact having an upper surface with a first area; forming metal segments in a plane at the upper surface of the contacts, each metal segment being in contact with one or more of the contacts and having a second area greater than the first area; and forming one or more vias between one or more of the metal segments and one or more first segments of a first metal layer.
Public/Granted literature
- US20160141291A1 METAL SEGMENTS AS LANDING PADS AND LOCAL INTERCONNECTS IN AN IC DEVICE Public/Granted day:2016-05-19
Information query
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