发明授权
- 专利标题: Plasma reactor for abatement of hazardous material
- 专利标题(中): 用于消除有害物质的等离子体反应器
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申请号: US14698938申请日: 2015-04-29
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公开(公告)号: US09472381B2公开(公告)日: 2016-10-18
- 发明人: Min Hur , Woo Seok Kang , Jae Ok Lee
- 申请人: KOREA INSTITUTE OF MACHINERY & MATERIALS
- 申请人地址: KR Daejeon
- 专利权人: KOREA INSTITUTE OF MACHINERY & MATERIALS
- 当前专利权人: KOREA INSTITUTE OF MACHINERY & MATERIALS
- 当前专利权人地址: KR Daejeon
- 代理机构: Lex IP Meister, PLLC
- 优先权: KR10-2014-0052436 20140430; KR10-2014-0083093 20140703
- 主分类号: B01D53/32
- IPC分类号: B01D53/32 ; H01J37/32 ; H05H1/46
摘要:
A plasma reactor for abating hazardous materials included in process gases while being installed on an exhaust path of the process gases toward a vacuum pump is provided. The plasma reactor includes an insulator having a pipe shape through which process gases pass, a first ground electrode connected to a front end of the insulator facing the process chamber, a second ground electrode connected to a rear end of the insulator and provided with a facing part that faces a center of the inside of the insulator along the moving direction of process gases, and a driving electrode fixed to an external circumferential surface of the insulator and connected to a power supply applying an AC or RF voltage.
公开/授权文献
- US20150314233A1 PLASMA REACTOR FOR ABATEMENT OF HAZARDOUS MATERIAL 公开/授权日:2015-11-05
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