Invention Grant
- Patent Title: Methods of fabricating integrated circuits
- Patent Title (中): 集成电路的制造方法
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Application No.: US14270824Application Date: 2014-05-06
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Publication No.: US09472465B2Publication Date: 2016-10-18
- Inventor: Bongki Lee , Jin Ping Liu , Bharat Krishnan
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L29/66

Abstract:
Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, a method is provided for fabricating an integrated circuit. The method includes forming a first FET trench in a first FET region and a second FET trench in a second FET region of an interlayer dielectric material on a semiconductor substrate, at least partially filling the first and second FET trenches with a work function metal to form a work function metal layer, and at least partially removing a portion of the work function metal layer in the second FET trench. The first FET trench is defined as an NFET trench and the second FET trench is defined as a PFET trench.
Public/Granted literature
- US20150325681A1 METHODS OF FABRICATING INTEGRATED CIRCUITS Public/Granted day:2015-11-12
Information query
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