发明授权
- 专利标题: Integrated circuit package
- 专利标题(中): 集成电路封装
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申请号: US14205093申请日: 2014-03-11
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公开(公告)号: US09472515B2公开(公告)日: 2016-10-18
- 发明人: Thorsten Meyer , Gerald Ofner , Teodora Ossiander , Frank Zudock , Christian Geissler
- 申请人: INTEL CORPORATION
- 申请人地址: US CA Santa Clara
- 专利权人: INTEL CORPORATION
- 当前专利权人: INTEL CORPORATION
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt, P.C.
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/00 ; H01L23/525
摘要:
Embodiments of the present disclosure are directed towards a method of assembling an integrated circuit package. In embodiments the method may include providing a wafer having an unpatterned passivation layer to prevent corrosion of metal conductors embedded in the wafer. The method may further include laminating a dielectric material on the passivation layer to form a dielectric layer and selectively removing dielectric material to form voids in the dielectric layer. These voids may reveal portions of the passivation layer disposed over the metal conductors. The method may then involve removing the portions of the passivation layer to reveal the metal conductors. Other embodiments may be described and/or claimed.
公开/授权文献
- US20150262866A1 INTEGRATED CIRCUIT PACKAGE 公开/授权日:2015-09-17
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