- 专利标题: Method and apparatus for forming an integrated circuit with a metalized resistor in a standard cell configuration
-
申请号: US14714369申请日: 2015-05-18
-
公开(公告)号: US09478533B2公开(公告)日: 2016-10-25
- 发明人: Wei Yu Ma , Bo-Ting Chen , Ting Yu Chen , Kuo-Ji Chen , Li-Chun Tien
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Duane Morris LLP
- 主分类号: H01L27/02
- IPC分类号: H01L27/02 ; H01L21/8234 ; H01L27/06 ; H01L27/118 ; H01L49/02
摘要:
An integrated circuit includes a layer of a semiconductor device including a standard cell configuration having a fixed gate electrode pitch between gate electrode lines and a resistor formed of metal between the fixed gate electrode pitch of the standard cell configuration. In one embodiment, the integrated circuit can be charged device model (CDM) electrostatic discharge (ESD) protection circuit for a cross domain standard cell having the resistor formed of metal. A method of manufacturing integrated circuits includes forming a plurality of gate electrode lines separated by a gate electrode pitch to form a core standard cell device, applying at least a first layer of metal within the gate electrode pitch to form a portion of a resistor, and applying at least a second layer of metal to couple to the first layer of metal to form another portion of the resistor.
公开/授权文献
信息查询
IPC分类: