Invention Grant
US09478615B2 Blanket short channel roll-up implant with non-angled long channel compensating implant through patterned opening
有权
毯子短通道卷起植入物,具有通过图案化开口的非角度长通道补偿植入物
- Patent Title: Blanket short channel roll-up implant with non-angled long channel compensating implant through patterned opening
- Patent Title (中): 毯子短通道卷起植入物,具有通过图案化开口的非角度长通道补偿植入物
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Application No.: US14493749Application Date: 2014-09-23
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Publication No.: US09478615B2Publication Date: 2016-10-25
- Inventor: James W. Adkisson , Brent A. Anderson , Andres Bryant , Edward J. Nowak
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Gibb & Riley, LLC
- Agent Michael J. LeStrange, Esq.
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L21/28 ; H01L29/66 ; H01L29/08 ; H01L29/36 ; H01L29/78 ; H01L21/265

Abstract:
A method that forms a structure implants a well implant into a substrate, patterns a mask on the substrate (to have at least one opening that exposes a channel region of the substrate) and forms a conformal dielectric layer on the mask and to line the opening. The conformal dielectric layer covers the channel region of the substrate. The method also forms a conformal gate metal layer on the conformal dielectric layer, implants a compensating implant through the conformal gate metal layer and the conformal dielectric layer into the channel region of the substrate, and forms a gate conductor on the conformal gate metal layer. Additionally, the method removes the mask to leave a gate stack on the substrate, forms sidewall spacers on the gate stack, and then forms source/drain regions in the substrate partially below the sidewall spacers.
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