Invention Grant
- Patent Title: Reusable substrate carrier
- Patent Title (中): 可重复使用的基板载体
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Application No.: US14538766Application Date: 2014-11-11
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Publication No.: US09478697B2Publication Date: 2016-10-25
- Inventor: Sriskantharajah Thirunavukarasu , Mingwei Zhu , Karthik Elumalai , Thean Ming Tan , Yong Cao , Daniel Lee Diehl , Nag Patibandla
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: A47G29/08
- IPC: A47G29/08 ; H01L33/00

Abstract:
In some embodiments, a substrate carrier for holding a plurality of substrates comprises a disk formed of a continuous material to a nominal dimension which is approximately a multiple of a nominal dimension of a standard substrate size used in the manufacture of light emitting diode devices. In an embodiment, the disk is formed symmetrically about a central axis and defines a substantially planar upper surface. A first pair of pockets is defined in the upper surface of the disk, wherein the disk and each of the first pair of pockets are bisected by a first reference plane passing through the central axis. A second pair of pockets is defined in the upper surface of the disk, wherein the disk and each of the second pair of pockets are bisected by a second reference plane passing through the central axis.
Public/Granted literature
- US20160133781A1 REUSABLE SUBSTRATE CARRIER Public/Granted day:2016-05-12
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