Invention Grant
US09480140B2 Material modification by neutral beam source with selected collision angle
有权
具有选定碰撞角度的中性光束源进行材料修饰
- Patent Title: Material modification by neutral beam source with selected collision angle
- Patent Title (中): 具有选定碰撞角度的中性光束源进行材料修饰
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Application No.: US14549829Application Date: 2014-11-21
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Publication No.: US09480140B2Publication Date: 2016-10-25
- Inventor: Sang Ki Nam , Ludovic Godet
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agent Robert M. Wallace
- Main IPC: H05H3/02
- IPC: H05H3/02 ; H05H3/06 ; H01J37/32
Abstract:
A neutral beam is scanned across a workpiece surface and the beam angle is controlled in a manner that avoids variation in the beam source-to-workpiece distance during scanning.
Public/Granted literature
- US20160148713A1 MATERIAL MODIFICATION BY NEUTRAL BEAM SOURCE WITH SELECTED COLLISION ANGLE Public/Granted day:2016-05-26
Information query
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