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US09481579B2 Method for preparing a hydrosilane using hetero atom containing activated carbon 有权
使用含有活性炭的杂原子制备氢硅烷的方法

Method for preparing a hydrosilane using hetero atom containing activated carbon
Abstract:
The present invention relates to a method for preparing a hydrosilane using heteroatom-containing activated carbon, more particularly to a method for economically preparing a high-purity hydrosilane by redistribution of a chlorosilane using a heteroatom-containing activated carbon catalyst.
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