Invention Grant
US09481846B2 Sliding film, member on which sliding film is formed, and manufacturing method therefor 有权
滑膜,形成有滑膜的构件及其制造方法

Sliding film, member on which sliding film is formed, and manufacturing method therefor
Abstract:
There is provided a sliding film formed on a surface of a member which slides relative to another member. The sliding film includes, a metal-doped tetrahedral amorphous carbon layer; and a surface layer that is formed on top of the metal-doped tetrahedral amorphous carbon layer and has a higher coefficient of kinetic friction than the metal-doped tetrahedral amorphous carbon layer.
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