Invention Grant
- Patent Title: Buried signal transmission line
- Patent Title (中): 埋地信号传输线
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Application No.: US14307604Application Date: 2014-06-18
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Publication No.: US09484246B2Publication Date: 2016-11-01
- Inventor: Anthony I. Chou , Arvind Kumar , Sungjae Lee , Richard A. Wachnik
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/762 ; H01L21/84 ; H01L21/74 ; H01L27/12

Abstract:
A buried conductive layer is formed underneath a buried insulator layer of a semiconductor-on-insulator (SOI) substrate. A deep isolation trench laterally surrounding a portion of the buried conductive layer is formed, and is filled with at least a dielectric liner to form a deep capacitor trench isolation structure. Contact via structures are formed through the buried insulator layer and a top semiconductor layer and onto the portion of the buried conductive layer, which constitutes a buried conductive conduit. The deep capacitor trench isolation structure may be formed concurrently with at least one deep trench capacitor. A patterned portion of the top semiconductor layer may be employed as an additional conductive conduit for signal transmission. Further, the deep capacitor trench isolation structure may include a conductive portion, which can be electrically biased to control the impedance of the signal path including the buried conductive conduit.
Public/Granted literature
- US20150371893A1 BURIED SIGNAL TRANSMISSION LINE Public/Granted day:2015-12-24
Information query
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