- 专利标题: Semiconductor device and a method of manufacturing the same
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申请号: US14953382申请日: 2015-11-29
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公开(公告)号: US09484286B2公开(公告)日: 2016-11-01
- 发明人: Shinya Suzuki
- 申请人: RENESAS ELECTRONICS CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: Renesas Electronics Corporation
- 当前专利权人: Renesas Electronics Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Shapiro, Gabor and Rosenberger, PLLC
- 优先权: JP2007-292079 20071109
- 主分类号: H01L23/485
- IPC分类号: H01L23/485 ; H01L23/528 ; H01L21/768 ; H01L23/522 ; H01L23/00 ; G02F1/1345 ; H01L21/02 ; H01L21/3105 ; H01L21/311 ; H01L27/13 ; H01L29/78
摘要:
A technique which improves the reliability in coupling between a bump electrode of a semiconductor chip and wiring of a mounting substrate, more particularly a technique which guarantees the flatness of a bump electrode even when wiring lies in a top wiring layer under the bump electrode, thereby improving the reliability in coupling between the bump electrode and the wiring formed on a glass substrate. Wiring, comprised of a power line or signal line, and a dummy pattern are formed in a top wiring layer beneath a non-overlap region of a bump electrode. The dummy pattern is located to fill the space between wirings to reduce irregularities caused by the wirings and space in the top wiring layer. A surface protection film formed to cover the top wiring layer is flattened by CMP.
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