Invention Grant
- Patent Title: Systems and methods for pressure differential molecular spectroscopy of compressible fluids
- Patent Title (中): 可压缩流体的压力差分谱法的系统和方法
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Application No.: US14511842Application Date: 2014-10-10
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Publication No.: US09488570B2Publication Date: 2016-11-08
- Inventor: Vidi A. Saptari
- Applicant: MKS Instruments, Inc. , Pason Systems Corp.
- Applicant Address: CA Calgary US MA Andover
- Assignee: Pason Systems Corp.,MKS Instruments, Inc.
- Current Assignee: Pason Systems Corp.,MKS Instruments, Inc.
- Current Assignee Address: CA Calgary US MA Andover
- Agency: Choate, Hall & Stewart—LLP
- Agent William R. Haulbrook; Margo R. Monroe
- Main IPC: G01N21/31
- IPC: G01N21/31 ; G01N21/05 ; G01N21/3504 ; G01N33/22 ; G01N21/359 ; G01N21/3518

Abstract:
Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.
Public/Granted literature
- US20150131093A1 SYSTEMS AND METHODS FOR PRESSURE DIFFERENTIAL MOLECULAR SPECTROSCOPY OF COMPRESSIBLE FLUIDS Public/Granted day:2015-05-14
Information query
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