Invention Grant
- Patent Title: Rule and lithographic process co-optimization
- Patent Title (中): 规则和光刻工艺协同优化
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Application No.: US14398416Application Date: 2013-04-16
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Publication No.: US09489479B2Publication Date: 2016-11-08
- Inventor: Xiaofeng Liu
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2013/057938 WO 20130416
- International Announcement: WO2013/164187 WO 20131107
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F7/20 ; H05K3/00

Abstract:
A computer-implemented method for obtaining values of one or more design variables of one or more design rules for a pattern transfer process comprising a lithographic projection apparatus, the method comprising: simultaneously optimizing one or more design variables of the pattern transfer process and the one or more design variables of the one or more design rules. The optimizing comprises evaluating a cost function that measures a metric characteristic of the pattern transfer process, the cost function being a function of one or more design variables of the pattern transfer process and one or more design variables of the one or more design rules.
Public/Granted literature
- US20150089459A1 DESIGN RULE AND LITHOGRAPHIC PROCESS CO-OPTIMIZATION Public/Granted day:2015-03-26
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