Invention Grant
- Patent Title: Noise shielding techniques for ultra low current measurements in biochemical applications
-
Application No.: US14808953Application Date: 2015-07-24
-
Publication No.: US09490204B2Publication Date: 2016-11-08
- Inventor: Roger J. A. Chen
- Applicant: Genia Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Genia Technologies, Inc.
- Current Assignee: Genia Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Van Pelt, Yi & James LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/522 ; H01L23/552 ; G01N27/447 ; H01L21/768 ; G01N33/487 ; H01L23/58 ; H01L49/02 ; B82Y15/00

Abstract:
A device having an integrated noise shield is disclosed. The device includes a plurality of vertical shielding structures substantially surrounding a semiconductor device. The device further includes an opening above the semiconductor device substantially filled with a conductive fluid, wherein the plurality of vertical shielding structures and the conductive fluid shield the semiconductor device from ambient radiation. In some embodiments, the device further includes a conductive bottom shield below the semiconductor device shielding the semiconductor device from ambient radiation. In some embodiments, the opening is configured to allow a biological sample to be introduced into the semiconductor device. In some embodiments, the vertical shielding structures comprise a plurality of vias, wherein each of the plurality of vias connects more than one conductive layers together. In some embodiments, the device comprises a nanopore device, and wherein the nanopore device comprises a single cell of a nanopore array.
Public/Granted literature
- US20160027728A1 NOISE SHIELDING TECHNIQUES FOR ULTRA LOW CURRENT MEASUREMENTS IN BIOCHEMICAL APPLICATIONS Public/Granted day:2016-01-28
Information query
IPC分类: