发明授权
- 专利标题: Capacitor using middle of line (MOL) conductive layers
- 专利标题(中): 使用中线(MOL)导电层的电容器
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申请号: US14690144申请日: 2015-04-17
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公开(公告)号: US09496254B2公开(公告)日: 2016-11-15
- 发明人: PR Chidambaram , Bin Yang
- 申请人: QUALCOMM Incorporated
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM Incorporated
- 当前专利权人: QUALCOMM Incorporated
- 当前专利权人地址: US CA San Diego
- 代理商 Alan Gordon; Kenneth Vu
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L27/06 ; H01L49/02 ; H01L23/522
摘要:
A method for fabricating a metal-insulator-metal (MIM) capacitor includes depositing a first middle of line (MOL) conductive layer over a shallow trench isolation (STI) region of a semiconductor substrate. The first MOL conductive layer provides a first plate of the MIM capacitor as well as a first set of local interconnects to source and drain regions of a semiconductor device. The method also includes depositing an insulator layer on the first MOL conductive layer as a dielectric layer of the MIM capacitor. The method further includes depositing a second MOL conductive layer on the insulator layer as a second plate of the MIM capacitor.
公开/授权文献
- US20150221638A1 CAPACITOR USING MIDDLE OF LINE (MOL) CONDUCTIVE LAYERS 公开/授权日:2015-08-06
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