Invention Grant
- Patent Title: Resist top-coat composition and patterning process
- Patent Title (中): 抗顶层涂层组合和图案化工艺
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Application No.: US14622291Application Date: 2015-02-13
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Publication No.: US09507262B2Publication Date: 2016-11-29
- Inventor: Jun Hatakeyama , Hyun-Woo Kim
- Applicant: Shin-Etsu Chemical Co., Ltd. , Samsung Electronics Co., Ltd.
- Applicant Address: JP Tokyo KR
- Assignee: Shin-Etsu Chemical Co., Ltd.,Samsung Electronics Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.,Samsung Electronics Co., Ltd.
- Current Assignee Address: JP Tokyo KR
- Agency: Myers Bigel, P.A.
- Priority: JP2014-026586 20140214
- Main IPC: G03F7/09
- IPC: G03F7/09 ; G03F7/20 ; G03F7/11

Abstract:
There are provided a top coat composition and a patterning process using that composition, which reduce the effect of contaminants in the surrounding atmosphere on the resist film in absorbing OOB light and in reducing film loss of the resist pattern and bridging between patterns, and also enhances the sensitivity of the resist film and suppresses the emission of outgas from the resist film. The resist top coat composition of the present invention is formed on a photoresist film formed on a wafer, and is used in a patterning process performed by lithography in which, after exposure, developing is performed. The resist top coat composition contains a polymer as a base resin having a repeating unit p of styrene having a 1,1,1,3,3,3-hexafluoro-2-propanol group shown by the following general formula (1), a C6-C10 ether compound, and a C7-C12 hydrocarbon compound, and wherein m is 1 or 2, and p is in the range of 0
Public/Granted literature
- US20150234274A1 RESIST TOP-COAT COMPOSITION AND PATTERNING PROCESS Public/Granted day:2015-08-20
Information query
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