Invention Grant
- Patent Title: Laser crystallization system, laser crystallization method, and method of fabricating display device
- Patent Title (中): 激光结晶系统,激光结晶方法及制造显示装置的方法
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Application No.: US14658051Application Date: 2015-03-13
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Publication No.: US09508932B2Publication Date: 2016-11-29
- Inventor: Sang Hyun Jeon , Eun Jeong Cho
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2014-0151307 20141103
- Main IPC: C30B13/24
- IPC: C30B13/24 ; H01L51/00 ; H01L27/32 ; C30B15/00

Abstract:
A laser crystallization system, including an output unit configured to generate output laser light, an optical unit configured to split the output laser light into a first laser light and a second laser light, and to process the first laser light to have a crystallization energy density, a moving unit configured to move a target object to be irradiated with the first laser light and the second laser light, a detection unit configured to detect surface information of the target object utilizing the second laser light, and an input unit configured to receive the detected surface information and to transmit a control signal to the output unit and the moving unit, wherein the laser crystallization system is configured to detect the surface information of the target object and to crystallize the target object utilizing only the output laser light.
Public/Granted literature
- US20160126457A1 LASER CRYSTALLIZATION SYSTEM, LASER CRYSTALLIZATION METHOD, AND METHOD OF FABRICATING DISPLAY DEVICE Public/Granted day:2016-05-05
Information query
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