Invention Grant
US09508932B2 Laser crystallization system, laser crystallization method, and method of fabricating display device 有权
激光结晶系统,激光结晶方法及制造显示装置的方法

Laser crystallization system, laser crystallization method, and method of fabricating display device
Abstract:
A laser crystallization system, including an output unit configured to generate output laser light, an optical unit configured to split the output laser light into a first laser light and a second laser light, and to process the first laser light to have a crystallization energy density, a moving unit configured to move a target object to be irradiated with the first laser light and the second laser light, a detection unit configured to detect surface information of the target object utilizing the second laser light, and an input unit configured to receive the detected surface information and to transmit a control signal to the output unit and the moving unit, wherein the laser crystallization system is configured to detect the surface information of the target object and to crystallize the target object utilizing only the output laser light.
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