Invention Grant
US09510107B2 Double diaphragm MEMS microphone without a backplate element 有权
双隔膜MEMS麦克风无背板元件

Double diaphragm MEMS microphone without a backplate element
Abstract:
A sensor structure may include a first suspended structure and a second suspended structure disposed from the first suspended structure to form a volume. The first suspended structure and the second suspended structure may be arranged relative to each other such that a received pressure wave entering the volume between the first suspended structure and the second suspended structure generates a displacement of the first suspended structure to a first direction and a displacement of the second suspended structure to a second direction different from the first direction and the displacement may generate a measurable signal.
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