发明授权
US09512515B2 Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
有权
有机层沉积装置及使用该有机发光显示装置的有机发光显示装置的制造方法
- 专利标题: Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
- 专利标题(中): 有机层沉积装置及使用该有机发光显示装置的有机发光显示装置的制造方法
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申请号: US13492144申请日: 2012-06-08
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公开(公告)号: US09512515B2公开(公告)日: 2016-12-06
- 发明人: Seok-Rak Chang , Myeng-Woo Nam , Hee-Cheol Kang , Jong-Heon Kim , Jong-Won Hong , Uno Chang
- 申请人: Seok-Rak Chang , Myeng-Woo Nam , Hee-Cheol Kang , Jong-Heon Kim , Jong-Won Hong , Uno Chang
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-si
- 代理机构: Lewis Roca Rothgerber Christie LLP
- 优先权: KR10-2011-0066124 20110704
- 主分类号: B65G35/00
- IPC分类号: B65G35/00 ; C23C14/12 ; C23C14/50 ; H01L21/67 ; H01L21/677 ; H01L21/683
摘要:
An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyer unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyer unit passes through inside the chamber, and the first conveyer unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.