Invention Grant
- Patent Title: Opto-electronic inspection quality assurance system for fluid dispensing valves
- Patent Title (中): 流体分配阀的光电检测质量保证体系
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Application No.: US14433363Application Date: 2013-10-12
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Publication No.: US09518933B2Publication Date: 2016-12-13
- Inventor: Thomas E. Chatterton , Sebum Cheon
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- International Application: PCT/US2013/064732 WO 20131012
- International Announcement: WO2014/059395 WO 20140417
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/95 ; G01B11/00 ; G01N21/88 ; G01B13/00 ; G01B11/30

Abstract:
An optoelectronic inspection system useful for quality assurance determinations of fluid dispensing valves, e.g., as installed on fluid storage and dispensing vessels, and associated methodology and non-transitory computer readable media storing machine-executable instructions for such quality assurance determinations, are described. The optoelectronic inspection is applicable to flow control valves used on fluid storage and dispensing packages including physical adsorbent-based and/or pressure-regulated vessels, such as are used for supply of processing fluids used in the manufacture of semiconductor products, flat panel displays, and solar panels.
Public/Granted literature
- US20150276619A1 OPTO-ELECTRONIC INSPECTION QUALITY ASSURANCE SYSTEM FOR FLUID DISPENSING VALVES Public/Granted day:2015-10-01
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