Invention Grant
US09518933B2 Opto-electronic inspection quality assurance system for fluid dispensing valves 有权
流体分配阀的光电检测质量保证体系

Opto-electronic inspection quality assurance system for fluid dispensing valves
Abstract:
An optoelectronic inspection system useful for quality assurance determinations of fluid dispensing valves, e.g., as installed on fluid storage and dispensing vessels, and associated methodology and non-transitory computer readable media storing machine-executable instructions for such quality assurance determinations, are described. The optoelectronic inspection is applicable to flow control valves used on fluid storage and dispensing packages including physical adsorbent-based and/or pressure-regulated vessels, such as are used for supply of processing fluids used in the manufacture of semiconductor products, flat panel displays, and solar panels.
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