Invention Grant
- Patent Title: Broadband and wide field angle compensator
- Patent Title (中): 宽带和宽视角补偿器
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Application No.: US14466369Application Date: 2014-08-22
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Publication No.: US09519093B2Publication Date: 2016-12-13
- Inventor: Lawrence Rotter , Klaus Flock , Muzammil Arain , David Y. Wang
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Spano Law Group
- Agent Joseph S. Spano
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G02B5/30 ; G01N21/21 ; G02F1/13363

Abstract:
A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.
Public/Granted literature
- US20150055123A1 Broadband And Wide Field Angle Compensator Public/Granted day:2015-02-26
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