Invention Grant
- Patent Title: Substrate holding apparatus and method
- Patent Title (中): 基板保持装置及方法
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Application No.: US13956559Application Date: 2013-08-01
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Publication No.: US09519228B2Publication Date: 2016-12-13
- Inventor: Sung Hune Yoo
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2013-0035282 20130401
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/687
Abstract:
Provided are a substrate holding apparatus and a method of using the substrate holding apparatus. According to an aspect of the present invention, there is provided a substrate holding apparatus comprising a stage on which a substrate is placed, and at least one lift bar which separates the substrate from the stage by raising the substrate or placing the substrate on the stage by lowering the substrate. The lift bar comprises a body and a head. The head is connected to an end of the body, contacts the substrate, and is formed of a porous material.
Public/Granted literature
- US20140293257A1 SUBSTRATE HOLDING APPARATUS AND METHOD Public/Granted day:2014-10-02
Information query
IPC分类:
