Invention Grant
- Patent Title: Spectrometer
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Application No.: US14666249Application Date: 2015-03-23
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Publication No.: US09523610B2Publication Date: 2016-12-20
- Inventor: Mark Watson , Shane Buller , Keith Carron
- Applicant: MKS Technology
- Applicant Address: US WY Centennial
- Assignee: MKS Technology
- Current Assignee: MKS Technology
- Current Assignee Address: US WY Centennial
- Agency: Dinsmore & Shohl LLP
- Main IPC: G01J3/44
- IPC: G01J3/44 ; G01N33/543 ; G01N21/65 ; G01J3/06

Abstract:
A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
Public/Granted literature
- US20150260576A1 SPECTROMETER Public/Granted day:2015-09-17
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