- Patent Title: Thin film transistor array panel and manufacturing method thereof
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Application No.: US14875320Application Date: 2015-10-05
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Publication No.: US09524992B2Publication Date: 2016-12-20
- Inventor: Hye Young Ryu , Hee Jun Byeon , Woo Geun Lee , Kap Soo Yoon , Yoon Ho Kim , Chun Won Byun
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2012-0015901 20120216
- Main IPC: G02F1/1362
- IPC: G02F1/1362 ; H01L27/12 ; G02F1/1343 ; G02F1/1368

Abstract:
A thin film transistor array panel and a manufacturing method thereof according to an exemplary embodiment of the present invention form a contact hole in a second passivation layer formed of an organic insulator, protect a side of the contact hole by covering with a protection member formed of the same layer as the first field generating electrode and formed of a transparent conductive material, and etch the first passivation layer below the second passivation layer using the protection member as a mask. Therefore, it is possible to prevent the second passivation layer formed of an organic insulator from being overetched while etching the insulating layer below the second passivation layer so that the contact hole is prevented from being made excessively wide.
Public/Granted literature
- US20160027805A1 THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF Public/Granted day:2016-01-28
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