发明授权
US09528893B2 Optical fiber pressure sensor with uniform diaphragm and method of fabricating same
有权
具有均匀膜片的光纤压力传感器及其制造方法
- 专利标题: Optical fiber pressure sensor with uniform diaphragm and method of fabricating same
- 专利标题(中): 具有均匀膜片的光纤压力传感器及其制造方法
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申请号: US13381256申请日: 2010-06-29
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公开(公告)号: US09528893B2公开(公告)日: 2016-12-27
- 发明人: Wenhui Wang , Xingwei Vivian Wang , Kai Sun , Nan Wu
- 申请人: Wenhui Wang , Xingwei Vivian Wang , Kai Sun , Nan Wu
- 申请人地址: US MA Boston
- 专利权人: University of Massachusetts
- 当前专利权人: University of Massachusetts
- 当前专利权人地址: US MA Boston
- 代理机构: Hamilton, Brook, Smith & Reynolds, P.C.
- 国际申请: PCT/US2010/040460 WO 20100629
- 国际公布: WO2011/008559 WO 20110120
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G01L7/08
摘要:
An optical fiber sensor (100) can be used to measure pressure with high sensitivity and fine resolution. As a (108) at the end of the sensor expands or contracts, the spectrum of a beam reflected from the end of fiber shifts, producing a change linked to pressure exerted on the sensor. Novel aspects of the present inventive sensor include the direct bonding of a silica thin film diaphragm (110) to the optical fiber with localized or confined heating and a uniform thickness of the diaphragm. The resulting sensor has a diameter that matches the diameter of the optical fiber. Because the sensor is all silica, it does not from temperature-induced error. In addition, the sensor can be very sensitive because the diaphragm can be very thin; it can also make highly repeatable measurements due to its very uniform thickness.
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