Invention Grant
- Patent Title: Supply of a liquid-metal target in X-ray generation
- Patent Title (中): 在X射线产生中提供液态金属靶
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Application No.: US14457385Application Date: 2014-08-12
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Publication No.: US09530607B2Publication Date: 2016-12-27
- Inventor: Oscar Hemberg , Tomi Tuohimaa , Mikael Otendal
- Applicant: EXCILLUM AB
- Applicant Address: SE Kista
- Assignee: EXCILLUM AB
- Current Assignee: EXCILLUM AB
- Current Assignee Address: SE Kista
- Agency: Buchanan Ingersoll & Rooney, P.C.
- Main IPC: H01J35/02
- IPC: H01J35/02 ; H01J35/08 ; G03F7/20 ; H01J35/12 ; H05G2/00

Abstract:
Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump. The pressurized liquid metal is then conducted to a nozzle and ejected into a vacuum chamber in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir, and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump, suitable for the inlet of the high-pressure pump. Also, a corresponding circulation system and an X-ray source provided with such circulation system.
Public/Granted literature
- US20140348302A1 SUPPLY OF A LIQUID-METAL TARGET IN X-RAY GENERATION Public/Granted day:2014-11-27
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