Invention Grant
US09530662B2 Methods for fabricating integrated circuits using directed self-assembly including a substantially periodic array of topographical features that includes etch resistant topographical features for transferability control 有权
使用定向自组装制造集成电路的方法,其包括基本上周期性的地形特征阵列,其包括用于转移性控制的耐蚀刻地形特征

  • Patent Title: Methods for fabricating integrated circuits using directed self-assembly including a substantially periodic array of topographical features that includes etch resistant topographical features for transferability control
  • Patent Title (中): 使用定向自组装制造集成电路的方法,其包括基本上周期性的地形特征阵列,其包括用于转移性控制的耐蚀刻地形特征
  • Application No.: US14630676
    Application Date: 2015-02-25
  • Publication No.: US09530662B2
    Publication Date: 2016-12-27
  • Inventor: Azat LatypovTamer CoskunMoshe Preil
  • Applicant: GLOBALFOUNDRIES, Inc.
  • Applicant Address: KY Grand Cayman
  • Assignee: GLOBALFOUNDRIES, INC.
  • Current Assignee: GLOBALFOUNDRIES, INC.
  • Current Assignee Address: KY Grand Cayman
  • Agency: Lorenz & Kopf, LLP
  • Main IPC: H01L21/027
  • IPC: H01L21/027 H01L21/308
Methods for fabricating integrated circuits using directed self-assembly including a substantially periodic array of topographical features that includes etch resistant topographical features for transferability control
Abstract:
Methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes forming a substantially periodic array of a plurality of topographical features including a plurality of etch resistant topographical features and at least one graphoepitaxy feature. The plurality of etch resistant topographical features define a plurality of etch resistant confinement wells and the at least one graphoepitaxy feature defines a graphoepitaxy confinement well that has a different size and/or shape than the etch resistant confinement wells. A block copolymer is deposited into the confinement wells. The block copolymer is phase separated into an etchable phase and an etch resistant phase. The etch resistant topographical features direct the etch resistant phase to form an etch resistant plug in each of the etch resistant confinement wells.
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