Invention Grant
- Patent Title: Polysilicon thin film transistor and manufacturing method thereof, array substrate
- Patent Title (中): 多晶硅薄膜晶体管及其制造方法,阵列基板
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Application No.: US14345344Application Date: 2013-11-11
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Publication No.: US09530799B2Publication Date: 2016-12-27
- Inventor: Zuqiang Wang
- Applicant: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD. , BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Ordos, Inner Mongolia CN Beijing
- Assignee: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Ordos, Inner Mongolia CN Beijing
- Agency: Ladas & Parry LLP
- Priority: CN201310068300 20130305
- International Application: PCT/CN2013/086882 WO 20131111
- International Announcement: WO2014/134925 WO 20140912
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L27/12 ; H01L29/786 ; H01L21/02 ; H01L21/265 ; H01L21/324 ; H01L29/66

Abstract:
A polysilicon thin film transistor, a manufacturing method thereof, an array substrate involve display technology field, and can repair the boundary defect and the defect state in polysilicon, suppress the hot carrier effect and make the characteristics of TFTs more stable. The polysilicon thin film transistor includes a gate electrode, a source electrode, a drain electrode and an active layer, the active layer comprises at least a channel area, first doped regions, second doped regions and heavily doped regions, and the first doped regions are disposed on two sides of the channel area, the second doped regions are disposed on sides of the first doped regions away from the channel area; the heavily doped regions are disposed on sides of the second doped regions opposed to the first doped regions; and dosage of ions in the heavily doped regions lies between that in the first doped regions and that in the second doped regions.
Public/Granted literature
- US20150206905A1 POLYSILICON THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE Public/Granted day:2015-07-23
Information query
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