Invention Grant
- Patent Title: Intermittent contact resonance atomic force microscope and process for intermittent contact resonance atomic force microscopy
- Patent Title (中): 间歇接触共振原子力显微镜和间歇接触共振原子力显微镜的过程
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Application No.: US14816438Application Date: 2015-08-03
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Publication No.: US09535085B2Publication Date: 2017-01-03
- Inventor: Gheorghe Stan , Richard S. Gates
- Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY , Gheorghe Stan
- Applicant Address: US DC Washington US MD College Park
- Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE,UNIVERSITY OF MARYLAND, COLLEGE PARK
- Current Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE,UNIVERSITY OF MARYLAND, COLLEGE PARK
- Current Assignee Address: US DC Washington US MD College Park
- Agent Toby D. Hain
- Main IPC: G01Q10/00
- IPC: G01Q10/00 ; G01Q60/34

Abstract:
An intermittent contact atomic force microscope includes: a cantilever configured to receive a contact resonance modulation; a sample disposed proximate to the cantilever; a contact resonance modulator in communication with the cantilever and configured to provide the contact resonance modulation to the cantilever; and a scan modulator in mechanical communication with the sample to provide a scan modulation to the sample. Also disclosed is a process for performing intermittent contact atomic force microscopy, the process includes: providing a dual modulation microscope including: a cantilever configured to receive a contact resonance modulation; a sample disposed proximate to the cantilever; a contact resonance modulator in communication with the cantilever and configured to provide the contact resonance modulation to the cantilever; and a scan modulator in mechanical communication with the sample to provide a scan modulation to the sample; subjecting the cantilever to the contact resonance modulation; modulating the cantilever at a contact resonance frequency; subjecting the sample to the scan modulation; and modulating the sample at a scan modulation frequency to perform intermittent contact atomic force microscopy.
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